Minimizing resputtering of Pt-coated microspheres in a batch magnetron sputtering process

Technical Report · Fri Jul 10 00:00:00 EDT 1981

DOI:https://doi.org/10.2172/6318623· OSTI ID:6318623

Plake, A L

Preventing DT loss from glass microspheres being smoothly coated with PT is needed during fabrication of laser fusion targets. Evidence indicates that the increase of substrate temperature due to resputtering will cause DT loss. Resputtering will prevent a smooth and uniform coating on these glass microspheres (140 ..mu..m in diameter). This paper reviews the method that was developed to find a set of coating conditions to minimize the DT loss, and still be able to produce thick smooth Pt coated glass microspheres.

• Research Organization: Lawrence Livermore National Lab., CA (USA)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 6318623
• Report Number(s): UCID-19092; ON: DE81027451
• Country of Publication: United States
• Language: English

Related Subjects

060201* -- Fusion Fuels-- Fabrication & Testing-- (1980-1987)
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
COATINGS
DEUTERIUM COMPOUNDS
DEUTERIUM TRITIDES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
HYDROGEN COMPOUNDS
LABELLED COMPOUNDS
LASER TARGETS
MAGNETRONS
METALS
MICROSPHERES
MICROWAVE EQUIPMENT
MICROWAVE TUBES
PLATINUM
PLATINUM METALS
SPUTTERING
TARGETS
TRANSITION ELEMENTS
TRITIUM COMPOUNDS