Recent advances in Pt coating of microspheres by a batch magnetron sputtering process
Some proposed inertial confinement fusion targets require high-Z, high density metal coatings on glass microspheres. Platinum, which satisfies the high-Z and density requirements, can be coated onto microspheres with a batch magnetron sputtering process incorporating oxygen as a dopant gas to prevent the microspheres from sticking. This paper outlines recent progress in three areas: First, the coating process has been improved; second, the oxygen content and resistivity of the oxygen doped platinum films are analyzed; and third, the roles oxygen may play in reducing microsphere sticking during sputtering are discussed in regard to cold welding, Van der Waals bonding, electrostatic sticking, and sintering.
- Research Organization:
- Lawrence Livermore National Laboratory, P.O. Box 5508, Livermore, California 94550
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 6350785
- Journal Information:
- J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 18:3; ISSN JVSTA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
700208* -- Fusion Power Plant Technology-- Inertial Confinement Technology
AUGER ELECTRON SPECTROSCOPY
CHEMICAL REACTIONS
COATINGS
COHERENT SCATTERING
CONFINEMENT
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON SPECTROSCOPY
ELEMENTS
FABRICATION
FILMS
GLASS
INERTIAL CONFINEMENT
JOINING
LASER FUSION REACTORS
METALS
MICROSPHERES
MORPHOLOGY
OXIDATION
PHYSICAL PROPERTIES
PLASMA CONFINEMENT
PLATINUM
PLATINUM METALS
SCATTERING
SPECTROSCOPY
SPUTTERING
TARGETS
THERMONUCLEAR REACTORS
TRANSITION ELEMENTS
VAN DER WAALS FORCES
WELDING
X-RAY DIFFRACTION