Laser-driven chemical reaction for etching LiNbO/sub 3/

Journal Article · Mon Aug 25 04:00:00 EDT 1986 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.97121· OSTI ID:5335658

Ashby, C I.H.; Brannon, P J

The first laser-driven chemical reaction for etching ionic solids based on the fusion of salts in the molten phase is reported here for the reaction of LiNbO/sub 3/ with KF. The process involves spatially localized melting of LiNbO/sub 3/ by high-power-density laser pulses with photon energies in excess of the band gap of LiNbO/sub 3/. While molten, LiNbO/sub 3/ undergoes reaction with KF to form niobium oxyfluoride anions by fusion of the salts. The resulting solid is highly water soluble. The insolubility of LiNbO/sub 3/ permits subsequent removal of only the irradiated area by rinsing in water. This laser-driven chemical etching process shows great potential for applications which require either smooth surface morphology or very rapid etching rates.

• Research Organization: Sandia National Laboratories, Albuquerque, New Mexico 87185
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5335658
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 49:8; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
ALKALI METAL COMPOUNDS
CHEMICAL REACTIONS
ELECTROMAGNETIC RADIATION
ETCHING
HEATING
HYDROFLUORIC ACID
HYDROGEN COMPOUNDS
INORGANIC ACIDS
LASER RADIATION
LASER-RADIATION HEATING
LITHIUM COMPOUNDS
MELTING
NIOBATES
NIOBIUM COMPOUNDS
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PLASMA HEATING
RADIATIONS
REFRACTORY METAL COMPOUNDS
SOLUBILITY
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS