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Title: Etching of LiNbO/sub 3/ by laser-driven fusion of salts

Abstract

Lithium niobate exhibits low reactivity with most chemical etchants. Consequently, etching a LiNbO/sub 3/ surface to produce optical structures such as ridge waveguides or grooves for fiber coupling normally requires relatively slow processses such as ion milling. We have developed a laser-driven chemical etching process for etching highly unreactive ionic solids based on the fusion of salts in the molten phase which can be more than 100 times faster than ion milling rates. This process involves spatially localized melting of LiNbO/sub 3/ by higher-power density laser pulses with photon energies in excess of the band gap of LiNbO/sub 3/. While molten, LiNbO/sub 3/ undergoes reaction with a surface coating of KF to form niobium oxyfluoride anions by fusion of the salts. The resulting solid is highly water soluble. The insolubility of LiNbO/sub 3/ permits subsequent removal of only the irradiated area by rinsing in water. Surface morphology is determined by laser density. The process exhibits a wavelength dependence.

Authors:
;
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (USA)
OSTI Identifier:
7224866
Report Number(s):
SAND-86-1395C; CONF-861207-12
ON: DE87003033
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Conference
Resource Relation:
Conference: Materials Research Society fall meeting, Boston, MA, USA, 1 Dec 1986
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; LITHIUM COMPOUNDS; ETCHING; NIOBATES; LASER-RADIATION HEATING; MELTING; MOLTEN SALTS; POTASSIUM FLUORIDES; PULSED IRRADIATION; SURFACES; ALKALI METAL COMPOUNDS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; HEATING; IRRADIATION; NIOBIUM COMPOUNDS; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PLASMA HEATING; POTASSIUM COMPOUNDS; REFRACTORY METAL COMPOUNDS; SALTS; SURFACE FINISHING; TRANSITION ELEMENT COMPOUNDS; 360601* - Other Materials- Preparation & Manufacture

Citation Formats

Ashby, C I.H., and Brannon, P J. Etching of LiNbO/sub 3/ by laser-driven fusion of salts. United States: N. p., 1986. Web.
Ashby, C I.H., & Brannon, P J. Etching of LiNbO/sub 3/ by laser-driven fusion of salts. United States.
Ashby, C I.H., and Brannon, P J. Wed . "Etching of LiNbO/sub 3/ by laser-driven fusion of salts". United States.
@article{osti_7224866,
title = {Etching of LiNbO/sub 3/ by laser-driven fusion of salts},
author = {Ashby, C I.H. and Brannon, P J},
abstractNote = {Lithium niobate exhibits low reactivity with most chemical etchants. Consequently, etching a LiNbO/sub 3/ surface to produce optical structures such as ridge waveguides or grooves for fiber coupling normally requires relatively slow processses such as ion milling. We have developed a laser-driven chemical etching process for etching highly unreactive ionic solids based on the fusion of salts in the molten phase which can be more than 100 times faster than ion milling rates. This process involves spatially localized melting of LiNbO/sub 3/ by higher-power density laser pulses with photon energies in excess of the band gap of LiNbO/sub 3/. While molten, LiNbO/sub 3/ undergoes reaction with a surface coating of KF to form niobium oxyfluoride anions by fusion of the salts. The resulting solid is highly water soluble. The insolubility of LiNbO/sub 3/ permits subsequent removal of only the irradiated area by rinsing in water. Surface morphology is determined by laser density. The process exhibits a wavelength dependence.},
doi = {},
url = {https://www.osti.gov/biblio/7224866}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {1}
}

Conference:
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