Scanning probe microscopy and how it can be utilized in the manufacture of diffraction gratings

Conference · Tue Dec 31 00:00:00 EST 1996

OSTI ID:531528

Bach, B W ^[1]

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1. Hyperfine Inc., Boulder, CO (United States)

Ruled diffraction gratings and even holographic ones have a surface texture or an inherent roughness that is part of the grating making process. Using the new scanning probe microscopy (SPM), the authors can now see the structure that has been long suspected but not revealed using scanning electron microscopy (SEM). Also using the SPM, they review the surface structure in the film prior to ruling as well as after. Gaining this experience, they have been able to make adjustments to the diamond tool and weight to improve the final products.

• OSTI ID: 531528
• Report Number(s): CONF-960848-; ISBN 0-8194-2244-4; TRN: 97:017821
• Resource Relation: Conference: Denver `96: 1. conference on space processing of materials, at SPIE International Society for Optical Engineering (SPIE) annual international symposium on optical science, engineering, and instrumentation, Denver, CO (United States), 4-9 Aug 1996; Other Information: PBD: 1996; Related Information: Is Part Of Optics for high-brightness synchrotron radiation beamlines II; Berman, L.E. [ed.] [Brookhaven National Lab., Upton, NY (United States)]; Arthur, J. [ed.] [Stanford Univ., CA (United States)]|[European Synchrotron Radiation Facility, Grenoble (France)]; PB: 368 p.; Proceedings/SPIE, Volume 2856
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
SYNCHROTRON RADIATION SOURCES
DIFFRACTION GRATINGS
MICROSCOPY
DIAGNOSTIC TECHNIQUES
MANUFACTURING
MORPHOLOGY
MACHINE TOOLS
QUALITY CONTROL