The combination of scanning electron and scanning probe microscopy
Journal Article
·
· AIP Conference Proceedings
- Institute for analytical instrumentation of the Russian Academy of Sciences, St. Petersburg 190103 (Russian Federation)
- Russian Federation
We suggest the SPM module to combine SEM and SPM methods for studying surfaces. The module is based on the original mechanical moving and scanning system. The examples of studies of the steel surface microstructure in both SEM and SPM modes are presented.
- OSTI ID:
- 22609114
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1748; ISSN APCPCS; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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