Self-aligned silicon tips coated with diamondlike carbon

Journal Article · Sat Mar 01 04:00:00 EST 1997 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.589598· OSTI ID:527857

Lee, S; Lee, S; Lee, S; Jeon, D ^[1]; Lee, K ^[2]

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1. Department of Physics, Myong Ji University, Yongin Kyunggi Do, Seoul 449-728 (Korea)
2. Division of Ceramics, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 130-650 (Korea)

Silicon field emitter tips are coated with diamondlike carbon (DLC) film. Argon-ion bombardment of the tips increased the aspect ratio and helped uniform DLC coating. Using DLC-coated tips, we have fabricated a self-aligned gated field emission array. {copyright} {ital 1997 American Vacuum Society.}

• OSTI ID: 527857
• Report Number(s): CONF-9607192--
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 2 Vol. 15; ISSN 0734-211X; ISSN JVTBD9
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
ARGON IONS
CARBON
CATHODES
FABRICATION
FIELD EMISSION
MICROELECTRONICS
RADIATION EFFECTS
SILICON
VAPOR DEPOSITED COATINGS