Energy distributions of field emitted electrons from carbide tips and tungsten tips with diamondlike carbon coatings

Journal Article · Fri Nov 01 04:00:00 EST 1996 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.588670· OSTI ID:399790

Yu, M L ^[1]; Kim, H; Hussey, B W; Chang, T H ^[1]; Mackie, W A ^[2]

---

1. IBM Research Division, T.J. Watson Research Center, Yorktown Heights, New York 10598 (United States)
2. Linfield Research Institute, Linfield College, McMinnville, Oregon 97128 (United States)

We have measured the energy distributions of electrons field emitted from tungsten carbide, HfC{l_angle}100{r_angle}, and ZrC{l_angle}100{r_angle} tips, and tungsten field emitters with diamondlike carbon coatings. Multiple-peaked energy distributions were observed from instability induced emission sites on the carbide tips. Energy distributions of electrons field emitted from the diamondlike carbon coated tungsten tips were broader than those from metal tips. They also showed a shift towards lower energies with increases in the emission current. {copyright} {ital 1996 American Vacuum Society}

• OSTI ID: 399790
• Report Number(s): CONF-960582--
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 6 Vol. 14; ISSN 0734-211X; ISSN JVTBD9
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
CATHODES
COATINGS
ELECTRON EMISSION
ENERGY SPECTRA
FIELD EMISSION
TUNGSTEN
TUNGSTEN CARBIDES