Modification of Y sub 2 Ba sub 4 Cu sub 8 O sub 16 thin-film surfaces by interaction with a radio frequency excited oxygen plasma

Journal Article · Mon Nov 27 04:00:00 EST 1989 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.102365· OSTI ID:5246839

Budhani, R C; Ruckman, M W ^[1]

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1. Department of Applied Science, Brookhaven National Laboratory, Upton, New York 11973 (USA)

The use of rf excited oxygen plasma for oxidizing and possible etching of SrTiO{sub 3} (100) supported Y{sub 2}Ba{sub 4}Cu{sub 8}O{sub 16} thin films is studied by photoemission. Oxygen plasma modifies the surface and eliminates photoemission features identified with surface impurities like BaCO{sub 3}. The resulting surface is barium deficient but shows a Fermi level suggesting it is metallic. Application of a {minus}200 V dc bias to the sample to increase the kinetic energy of the incident oxygen ions enhances either surface sputtering or atomic mixing and produces a surface which resembles YBa{sub 2}Cu{sub 3}O{sub 7}, because the photoemission spectra are similar to those published for cleaved crystal surfaces or films.

• DOE Contract Number: AS05-80ER10742; AC02-76CH00016
• OSTI ID: 5246839
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 55:22; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL REACTIONS
COPPER COMPOUNDS
COPPER OXIDES
DATA
EMISSION
ENERGY LEVELS
ETCHING
EXPERIMENTAL DATA
FABRICATION
FERMI LEVEL
FILMS
IMPURITIES
INFORMATION
MIXING
NUMERICAL DATA
OXIDATION
OXIDES
OXYGEN COMPOUNDS
PHOTOEMISSION
SECONDARY EMISSION
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SURFACE FINISHING
SURFACE TREATMENTS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES