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In situ preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputtering

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.99222· OSTI ID:5288604
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Thin superconducting films of YBa/sub 2/ Cu/sub 3/ O/sub 7/ have been prepared by magnetron sputtering from targets of sintered material in an oxygen-argon atmosphere. The compositional and structural properties were studied by Rutherford backscattering and x-ray diffraction. The films were deposited at substrate temperatures between 580 and 800 /sup 0/C. It was found that the material grows in the oxygen deficient tetragonal phase. In situ heat treatment at 430 /sup 0/C in pure O/sub 2/ atmosphere generates the orthorhombic structure and the films on sapphire and SrTiO/sub 3/ coated sapphire substrates show the full superconducting transition at 83 K

Research Organization:
Kernforschungszentrum Karlsruhe, Institut fuer Nukleare Festkoerperphysik, P.O. Box 3640, D-7500 Karlsruhe, Federal Republic of Germany
OSTI ID:
5288604
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:13; ISSN APPLA
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BACKSCATTERING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COMPOSITION
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DATA
DEPOSITION
DIFFRACTION
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
HIGH TEMPERATURE
INFORMATION
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES