Oxygenation and possible etching of high T sub c superconducting films by oxygen plasma
Conference
·
OSTI ID:5246545
The use of a radio frequency (rf) excited oxygen plasma for cleaning and oxygenation of high {Tc} superconducting films at room temperature is studied by photoemission spectroscopy. Plasma oxidation at {approximately}10 mT pressure, removes contaminants like carbon and causes the Ba 5p and 4d and the 0 1s corelevels to shift to lower binding energy. Valence band spectra for an epitaxial Y{sub 2}Ba{sub 4}Cu{sub 8}O{sub 15+x} film on SrTiO{sub 3}(001) show a Fermi edge and resemble spectra presented by other groups for YBa{sub 2}Cu{sub 3}O{sub 7} single crystals and epitaxial films. These films also show a sharp 0 is corelevel near 528 eV. Possible reactive ion etching of a degraded YBCO film surface is demonstrated in a series of spectra taken after successive oxygen plasma treatments. A surface contaminated with BaCO{sub 3} becomes barium deficient after the initial plasma treatment but a second plasma treatment of a substrate biased to {minus}200 V to promote sputtering produces photoemission features typical of an YBa{sub 2}Cu{sub 3}O{sub 7} surface. 24 refs., 4 figs.
- Research Organization:
- Brookhaven National Lab., Upton, NY (USA)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- AC02-76CH00016; AS05-80ER10742
- OSTI ID:
- 5246545
- Report Number(s):
- BNL-43119; CONF-891093--20; ON: DE90004956
- Country of Publication:
- United States
- Language:
- English
Similar Records
Oxygenation and possible etching of high T sub c superconducting films by oxygen plasma
Modification of Y sub 2 Ba sub 4 Cu sub 8 O sub 16 thin-film surfaces by interaction with a radio frequency excited oxygen plasma
Chemical states of Ba in YBa/sub 2/Cu/sub 3/O/sub 7/minus/delta/ studied by x-ray photoelectron spectroscopy
Conference
·
Wed Jan 24 23:00:00 EST 1990
· AIP Conference Proceedings (American Institute of Physics); (USA)
·
OSTI ID:6456907
Modification of Y sub 2 Ba sub 4 Cu sub 8 O sub 16 thin-film surfaces by interaction with a radio frequency excited oxygen plasma
Journal Article
·
Sun Nov 26 23:00:00 EST 1989
· Applied Physics Letters; (USA)
·
OSTI ID:5246839
Chemical states of Ba in YBa/sub 2/Cu/sub 3/O/sub 7/minus/delta/ studied by x-ray photoelectron spectroscopy
Journal Article
·
Thu Jun 01 00:00:00 EDT 1989
· Phys. Rev. B: Condens. Matter; (United States)
·
OSTI ID:6193087
Related Subjects
36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL REACTIONS
COPPER COMPOUNDS
COPPER OXIDES
ELEMENTS
EMISSION
ETCHING
FILMS
NONMETALS
OXIDATION
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHOTOEMISSION
PLASMA
SECONDARY EMISSION
STOICHIOMETRY
SUPERCONDUCTING FILMS
SURFACE FINISHING
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL REACTIONS
COPPER COMPOUNDS
COPPER OXIDES
ELEMENTS
EMISSION
ETCHING
FILMS
NONMETALS
OXIDATION
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHOTOEMISSION
PLASMA
SECONDARY EMISSION
STOICHIOMETRY
SUPERCONDUCTING FILMS
SURFACE FINISHING
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES