Oxygenation and possible etching of high T sub c superconducting films by oxygen plasma

Conference · Thu Jan 25 04:00:00 EST 1990 · AIP Conference Proceedings (American Institute of Physics); (USA)

OSTI ID:6456907

Ruckman, M W; Budhani, R C ^[1]; Qui, S L ^[2]

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1. Department of Applied Science, Brookhaven National Laboratory, Upton, NY (USA)
2. Physics Department, Brookhaven National Laboratory, Upton, NY (USA)

The use of a radio frequency (RF) excited oxygen plasma for cleaning and oxygenation of high T{sub {ital c}} superconducting films at room temperature is studied by photoemission spectroscopy. Plasma oxidation at {similar to}10 mT pressure, removes comtaminants like carbon and causes the Ba 5p and 4d and the 0 ls corelevels to shift to lower binding energy. Valence band spectra for an epitaxial Y{sub 2}Ba{sub 4}Cu{sub 8}O{sub 15+{ital x}} film on SrTiO{sub 3} (001) show a Fermi edge and resemble spectra presented by other groups for YBa{sub 2}Cu{sub 3}O{sub 7} single crystals and epitaxial films. These films also show a sharp 0 ls corelevel near 528 eV. Possible reactive ion etching of a degraded YBCO film surface is demonstrated in a series of spectra taken after successive oxygen plasma treatments. A surface contaminated with BaCO{sub 3} becomes barium deficient after the initial plasma treatment but a second plasma treatment of a substrate biased to {minus}200 V to promote sputtering produces photoemission features typical of an YBa{sub 2}Cu{sub 3}O{sub 7} surface.

• DOE Contract Number: AS05-80ER10742; AC02-76CH00016
• OSTI ID: 6456907
• Report Number(s): CONF-891092--
• Conference Information: Journal Name: AIP Conference Proceedings (American Institute of Physics); (USA) Journal Volume: 199:1
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL REACTIONS
CLEANING
COPPER COMPOUNDS
COPPER OXIDES
ELECTRON SPECTROSCOPY
ELECTRONIC STRUCTURE
ENERGY LEVELS
ETCHING
FERMI LEVEL
FILMS
HIGH-TC SUPERCONDUCTORS
OXIDATION
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
SPECTROSCOPY
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE CLEANING
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES