Method of fabricating solar cells

Patent · Tue Sep 23 04:00:00 EDT 1986

OSTI ID:5189745

Gonsiorawski, R C; Yates, D A

This patent describes a method of fabricating solid state semiconductor devices comprising in sequence the steps of: (a) providing a silicon substrate having opposing first and second surfaces and having on the first surface a mask in the form of a surface layer with a predetermined two-dimensional pattern therethrough exposing selected portions of the first surface; (b) exposing the first surface to a hydrogen ion beam of an intensity and for a duration sufficient to form a surface layer on the selected exposed portions of the first surface to which metals will only poorly adhere; (c) removing the mask; and (d) subjecting the first surface to metal plating so that a metal layer is formed on all portions of the first surface other than the selected exposed portions. A method is described according to claim above wherein the devices are photovoltaic.

• Assignee: Mobil Solar Energy Corp., Waltham, MA
• Patent Number(s): US 4612698
• OSTI ID: 5189745
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
BEAMS
CHARGED PARTICLES
DEPOSITION
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FABRICATION
HYDROGEN IONS
ION BEAMS
IONS
LAYERS
METALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLATING
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
SURFACE COATING
SURFACES
TIME DEPENDENCE