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U.S. Department of Energy
Office of Scientific and Technical Information

Method of fabricating solar cells

Patent ·
OSTI ID:5294164
A method is described of fabricating solid state semiconductor devices comprising in sequence the steps of: (a) providing a silicon substrate having opposing first and second surfaces; (b) exposing selected regions of the first surface to hydrogen ion beam of an intensity and for a duration sufficient to form a surface layer on the first surface to which selected metals will only poorly adhere; and (c) metallizing the first surface exclusive of the selected regions with at least one of the selected metals.
Assignee:
Mobil Solar Energy Corp., Waltham, MA
Patent Number(s):
US 4609565
OSTI ID:
5294164
Country of Publication:
United States
Language:
English