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Electron spin resonance study of high field stressing in metal-oxide-silicon device oxides

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.97391· OSTI ID:5184687
We find that two paramagnetic ''trivalent silicon'' centers appear to be responsible for damage resulting from Fowler--Nordheim injection of electrons into thermal oxides on silicon.
Research Organization:
Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, Pennsylvania 16802
OSTI ID:
5184687
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 49:19; ISSN APPLA
Country of Publication:
United States
Language:
English