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Optical properties of 21 thin-film materials in the 10 eV to 500 eV photon energy region

Thesis/Dissertation ·
OSTI ID:5071007
Reflectance measurements were used to derive the optical constants of 21 materials for 36 wavelengths from 24 to 1216 A. The samples studied are evaporated thin films of the transition metals, Ti, Zr, Nb, Mo, Ru, Rh, Pd, Hf, Ta, W, Re, Os, Ir, and Pt, the noble metals Ag and Au, and films of C, diamond, Al, Si, and SiC. The reflectometer used enables measurements to be performed from near normal incidence to grazing incidence, and is computer controlled, so that for each sample the reflectance was measured at many incidence angles; typically sixteen angles between 10/sup 0/ and 85/sup 0/ for wavelengths greater than 200 A, and ten or more grazing angles for wavelengths below 200 A. The optical constants, n and k, were determined from the reflectance versus angle of incidence data using a non-linear least squares curve-fitting technique based on the X/sup 2/ test of fit. This method also provides a direct approach for estimating the probably errors in the derived optical constants. Optical constants and related optical functions are presented for each of the 21 materials measured, thereby providing a set of optical data, determined from a single technique, that covers the photon energy range 10 eV to 500 eV.
Research Organization:
Colorado Univ., Boulder (USA)
OSTI ID:
5071007
Country of Publication:
United States
Language:
English