Optical constants for thin films of Ti, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Ir, Os, Pt, and Au from 24 A to 1216 A

Journal Article · Fri Jan 15 04:00:00 EST 1988 · Appl. Opt.; (United States)

DOI:https://doi.org/10.1364/AO.27.000246· OSTI ID:5485302

Windt, D L; Cash, Jr, W C; Scott, M; Arendt, P; Newnam, B; Fisher, R F; Swartzlander, A B

Reflectance vs incidence angle measurements have been performed from 24 A to 1216 A on electron-beam evaporated samples of Ti, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Ir, Os, Pt, and Au, and using a nonlinear least-squares curve-fitting technique, the optical constants have been determined. Independently measured values of the incident beam polarization, film thicknesses, and film surface roughnesses are incorporated into the derivation of the optical constants. Additionally, Auger electron spectroscopy depth profiling measurements have been performed on each sample to characterize sample composition including oxidation and contamination.

• Research Organization: University of Colorado, Center for Astrophysics and Space Astronomy, Boulder, Colorado 80309
• OSTI ID: 5485302
• Journal Information: Appl. Opt.; (United States), Journal Name: Appl. Opt.; (United States) Vol. 27:2; ISSN APOPA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
AUGER ELECTRON SPECTROSCOPY
CHEMICAL REACTIONS
DATA
ELECTRON SPECTROSCOPY
ELEMENTS
EXPERIMENTAL DATA
FILMS
INCIDENCE ANGLE
INFORMATION
LEAST SQUARE FIT
MAXIMUM-LIKELIHOOD FIT
METALS
NUMERICAL DATA
NUMERICAL SOLUTION
OPTICAL PROPERTIES
OXIDATION
PHYSICAL PROPERTIES
POLARIZATION
SPECTROSCOPY
THIN FILMS
TRANSITION ELEMENTS