GaInAsP/InP stripe-geometry laser with a reactive-ion-etched facet
Journal Article
·
· Appl. Phys. Lett.; (United States)
We report the first use of reactive-ion etching (RIE) to form mirror facets on GaInAsP/Inp double-heterostructure (DH) lasers (lambdaapprox.1.3 ..mu..m). The RIE, performed with a Cl/sub 2/:O/sub 2/ gas mixture, provides vertical etched walls with no undercutting. Initial laser results demonstrate that quasi-single-mode operation and reasonable threshold currents are possible.
- Research Organization:
- Bell Laboratories, Holmdel, New Jersey 07733
- OSTI ID:
- 5011124
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 37:8; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
Similar Records
GaInAsP/InP stripe lasers with etched mirrors fabricated by a wet chemical etch
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Journal Article
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Fri Aug 15 00:00:00 EDT 1980
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·
OSTI ID:5216240
GaInAsP/InP lasers with etched mirrors by reactive ion etching using a mixture of ethane and hydrogen
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· Appl. Phys. Lett.; (United States)
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Tue May 15 00:00:00 EDT 1984
· Appl. Phys. Lett.; (United States)
·
OSTI ID:6875824
Related Subjects
42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
ARSENIC COMPOUNDS
ARSENIDES
CHARGED PARTICLES
CHLORINE
CONFIGURATION
DATA
DISPERSIONS
ELECTROMAGNETIC RADIATION
ELEMENTS
ETCHING
EXPERIMENTAL DATA
FABRICATION
FLUIDS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GASES
HALOGENS
INDIUM COMPOUNDS
INDIUM PHOSPHIDES
INFORMATION
INFRARED RADIATION
IONS
LASER MIRRORS
LASERS
MIRRORS
MIXTURES
NONMETALS
NUMERICAL DATA
OSCILLATION MODES
OXYGEN
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
RADIATIONS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR LASERS
SURFACE FINISHING
420300* -- Engineering-- Lasers-- (-1989)
ARSENIC COMPOUNDS
ARSENIDES
CHARGED PARTICLES
CHLORINE
CONFIGURATION
DATA
DISPERSIONS
ELECTROMAGNETIC RADIATION
ELEMENTS
ETCHING
EXPERIMENTAL DATA
FABRICATION
FLUIDS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GASES
HALOGENS
INDIUM COMPOUNDS
INDIUM PHOSPHIDES
INFORMATION
INFRARED RADIATION
IONS
LASER MIRRORS
LASERS
MIRRORS
MIXTURES
NONMETALS
NUMERICAL DATA
OSCILLATION MODES
OXYGEN
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
RADIATIONS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR LASERS
SURFACE FINISHING