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Molecular beam deposition of Dy sub 1 Ba sub 2 Cu sub 3 O sub 7 minus. delta. (001) high-temperature superconductor thin films

Journal Article · · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)
DOI:https://doi.org/10.1116/1.578076· OSTI ID:5003347
; ;  [1]
  1. University of Notre Dame, Department of Electrical Engineering, Notre Dame, Indiana 46556 (United States)
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Epitaxial Dy{sub 1}Ba{sub 2}Cu{sub 3}O{sub 7{minus}{delta}}(001) high-temperature superconductor thin films on LaAlO{sub 3} substrates have been prepared by coevaporation of Dy, BaF{sub 2}, and Cu and postannealing. The vapors in desired ratio were evaporated from effusion cells in a miniature molecular beam deposition system. The films show critical transition temperature ({ital T}{sub {ital c},0}) of 89.5{plus minus}0.5 K. During process development it was found that single phase Dy{sub 1+x}Ba{sub 2{minus}x}Cu{sub 3}O{sub y}(001) thin films can be grown ({ital x}=0 to 0.3). Their electrical properties were useful in calibration of quartz crystal thin film thickness monitor (FTM) for determination of relationships between the actual vapor arrival rate (flux) and FTM reading.

DOE Contract Number:
FG02-90ER45427
OSTI ID:
5003347
Journal Information:
Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States) Vol. 10:2; ISSN JVTAD; ISSN 0734-2101
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360207 -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DYSPROSIUM COMPOUNDS
DYSPROSIUM OXIDES
EPITAXY
FILMS
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
MOLECULAR BEAM EPITAXY
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE EARTH COMPOUNDS
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE