Growth morphologies of (001), (100), and (010) oriented Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] high-temperature superconductor thin films on various substrates

Journal Article · Tue Mar 01 00:00:00 EST 1994 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.587077· OSTI ID:5151202

Choudhary, K M; Seshadri, P; Black, M ^[1]

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1. University of Notre Dame, Department of Electrical Engineering, Materials Science and Engineering Program, Notre Dame, Indiana 46556 (United States)

Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] thin film is a high-temperature superconductor material ([ital T][sub [ital c]]=93 K). The growth morphologies of Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] thin films on various substrates were studied by scanning electron microscopy. The films were prepared by molecular beam deposition and postgrowth annealing. The Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] thin films on LaAlO[sub 3] (100) [and SrTiO[sub 3] (100)] substrates showed small amount of (100) oriented grains on top of a (001) epilayer if the films were annealed in the 850--865 [degree]C range (film thickness=0.4 [mu]m). The (001) oriented Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]]/cubic-ZrO[sub 2](100) thin films showed a spherullite''-type growth morphology. On MgO (100) [and cubic-ZrO[sub 2](100)] substrates, Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] thin films with mixed (010) and (001) growth orientations were obtained.

• DOE Contract Number: FG02-90ER45427
• OSTI ID: 5151202
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Vol. 12:2; ISSN 0734-211X
• Country of Publication: United States
• Language: English

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