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Growth morphologies of (001), (100), and (010) oriented Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] high-temperature superconductor thin films on various substrates

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)
DOI:https://doi.org/10.1116/1.587077· OSTI ID:5151202
; ;  [1]
  1. University of Notre Dame, Department of Electrical Engineering, Materials Science and Engineering Program, Notre Dame, Indiana 46556 (United States)

Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] thin film is a high-temperature superconductor material ([ital T][sub [ital c]]=93 K). The growth morphologies of Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] thin films on various substrates were studied by scanning electron microscopy. The films were prepared by molecular beam deposition and postgrowth annealing. The Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] thin films on LaAlO[sub 3] (100) [and SrTiO[sub 3] (100)] substrates showed small amount of (100) oriented grains on top of a (001) epilayer if the films were annealed in the 850--865 [degree]C range (film thickness=0.4 [mu]m). The (001) oriented Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]]/cubic-ZrO[sub 2](100) thin films showed a spherullite''-type growth morphology. On MgO (100) [and cubic-ZrO[sub 2](100)] substrates, Er[sub 5]Ba[sub 7]Cu[sub 12]O[sub [ital y]] thin films with mixed (010) and (001) growth orientations were obtained.

DOE Contract Number:
FG02-90ER45427
OSTI ID:
5151202
Journal Information:
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 12:2; ISSN JVTBD9; ISSN 0734-211X
Country of Publication:
United States
Language:
English

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