Observation of nanocrystalline diamond in diamondlike carbon films deposited at room temperature in electron cyclotron resonance plasma
- Institut des Materiaux de Nantes, UMR 6502, CNRS-Universite de Nantes, 44322 Nantes Cedex 03 (France)
Diamondlike carbon (DLC) thin films have been prepared by chemical vapor deposition assisted by electron cyclotron resonance plasma at low pressure with radio frequency (rf) power applied to the substrate. The microstructure studies by transmission electron microscopy and electron energy loss spectroscopy show the existence of nanocrystalline diamond grains in DLC films prepared at 0.35 Pa. The cluster{close_quote}s size varies from 4 to 30 nm with bias voltage (V{sub b}) varying from {minus}200 to {minus}600V. A phase transition from hexagonal to cubic diamond was also observed with increasing V{sub b}. {copyright} {ital 1997 American Institute of Physics.}
- OSTI ID:
- 496351
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 19 Vol. 70; ISSN 0003-6951; ISSN APPLAB
- Country of Publication:
- United States
- Language:
- English
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