An electron imaging approach to soft-x-ray transmission spectromicroscopy

Journal Article · Fri Mar 01 00:00:00 EST 1996 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1146851· OSTI ID:434594

De Stasio, G ^[1]; Lorusso, G F ^[1]; Droubay, T ^[2]; Kohli, M; Muralt, P ^[3]; Perfetti, P ^[4]; Margaritondo, G ^[1]; Kelly, T F ^[5]; Tonner, B P ^[2]

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1. Institut de Physique Appliquee, Ecole Polytechnique Federal, PH-Ecublens, CH-1015 Lausanne (Switzerland)
2. Department of Physics, University of Wisconsin--Milwaukee, Milwaukee, Wisconsin 53211 (United States)
3. Laboratoire de Ceramique, Ecole Polytechnique Federale, MX-D-Ecublens, CH-1015 Lausanne (Switzerland)
4. Istituto de Struttura della Materia---CNR, Via E. Fermi 38, Frascati (Italy)
5. Department of Materials Science and Engineering, University of Wisconsin--Madison, Madison , Wisconsin 53706 (United States)

We tested a new soft-x-ray transmission spectromiscropy technique on the Aladdin storage ring at the Wisconsin Synchrotron Radiation Center. Transmitted x rays were converted with a photocathode into photoelectrons, which were subsequently electron-optically processed by an x-ray secondary electron-emission microscope producing submicron-resolution images. Test images demonstrated the excellent contrast due to the chemical differences between silicon features and a silicon nitride substrate. We also obtained x-ray transmission versus photon energy curves for microscopic specimen areas. {copyright} {ital 1996 American Institute of Physics.}

• OSTI ID: 434594
• Journal Information: Review of Scientific Instruments, Vol. 67, Issue 3; Other Information: PBD: Mar 1996
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
MICROSCOPY
SYNCHROTRON RADIATION
X-RAY SPECTROSCOPY
SILICON NITRIDES
CHEMICAL ANALYSIS
IMAGES
PHOTOCATHODES
PHOTOELECTRIC EFFECT
SILICON
SOFT X RADIATION
SYNCHROTRON RADIATION SOURCES