X-ray imaging of nanostructure patterns

Journal Article · Mon Jan 16 04:00:00 EST 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.100990· OSTI ID:6613681

Vladimirsky, Y; Kern, D; Meyer-Ilse, W; Attwood, D

A Fresnel zone plate lens, with a nominal outer zone width of 400 A, has been used to image nanostructures with soft x-ray synchrotron radiation at 45 A wavelength with the Goettingen x-ray microscope at BESSY in Berlin. The structures, consisting of gold lines in thin silicon nitride membranes, were selected for tests of spatial resolution and image forming capabilities. Several patterns associated with deep submicron electronic circuits were also imaged, showing clearly resolved features smaller than 0.1 ..mu..m. Images of periodic structures, including 600 A lines on 2000 A centers, suggest a spatial resolution approaching the theoretical limit of approximately 500 A.

• Research Organization: Center for x-ray optics, Lawrence Berkley Laboratory, University of California, Berkeley, California 94720
• OSTI ID: 6613681
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 54:3; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)
BREMSSTRAHLUNG
COATINGS
DEPOSITION
ELECTROMAGNETIC RADIATION
ELEMENTS
FABRICATION
FILMS
FRESNEL LENS
GOLD
IMAGES
IONIZING RADIATIONS
LENSES
METALS
MICROELECTRONICS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
RADIATIONS
RESOLUTION
SILICON COMPOUNDS
SILICON NITRIDES
SOFT X RADIATION
SPATIAL RESOLUTION
SURFACE COATING
SURFACES
SYNCHROTRON RADIATION
THIN FILMS
TRANSITION ELEMENTS
X RADIATION