EUV and soft x-ray transmission microscope

Journal Article · Sun Sep 01 04:00:00 EDT 1996 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1147388· OSTI ID:434767

Watts, R N; Lucatorto, T B; Liang, S T ^[1]; Polack, F ^[2]; Scheinfein, M R ^[3]

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1. National Institute of Standards and Technology, Physics Building (221), Room A253, Gaithersburg, MD 20899 (United States)
2. IOTA/LURE, BAT 503, BP 147, 91403, Orsay, Cedex (France)
3. Dept. of Physics & Astronomy, Arizona State University, Tempe, AZ 85287 (United States)

We present preliminary performance results for a new type of imaging microscope operating in the EUV and soft x-ray regions. This microscope is a true transmission microscope in which an unmagnified image of the sample is formed by differential absorption of the x-ray beam as it passes through the sample. The unmagnified photon image is converted into low energy secondary electrons at a thin CsI photocathode, and the subsequent electron pattern is magnified and imaged using a simple 3-lens system. Conversion of the magnified electron patern into visible photons occurs at a fine grain phosphor viewed by a CCD detector/computer combination that allows parallel detection of the original photon image in near real time with approximately 1000{times} magnification. The microscope has a theoretical resolution of 20 nm and a potentially wide range of uses including biology, materials science studies, and investigations into magnetic dichroism effects. The design and preliminary imaging results of the microscope will be presented and future directions discussed. {copyright} {ital 1996 American Institute of Physics.}

• OSTI ID: 434767
• Report Number(s): CONF-9510119--
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 9 Vol. 67; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
DESIGN
EXTREME ULTRAVIOLET RADIATION
MICROSCOPES
PERFORMANCE TESTING
SOFT X RADIATION
SYNCHROTRON RADIATION