Properties and structure of thin films of niobium nitride prepared by reactive cathode sputtering. I. Preparation and properties (in French)
Journal Article
·
· J. Less-Common Metals, v. 35, pp. 181-192
OSTI ID:4309381
The formation of thin films of niobium nitride by reactive sputtering is described. The influence of the various parameters empioyed in the preparation on the composition, structure and electrical properties (resistivity, temperature coefficient and critical temperature) of these films was investigated. The maximum observed critical temperature (15.85 deg K) corresponds to the formation of the stoichiometric compound niobium nitride. The existence of a material of composition Nb/sub 1-x/N (0 < x < 0.34) with the same structure as delta -Nb was also observed. (9 figures, 5 tables). ( auth)
- Research Organization:
- CEN, Grenoble, France
- NSA Number:
- NSA-29-024617
- OSTI ID:
- 4309381
- Journal Information:
- J. Less-Common Metals, v. 35, pp. 181-192, Journal Name: J. Less-Common Metals, v. 35, pp. 181-192; ISSN JCOMA
- Country of Publication:
- Country unknown/Code not available
- Language:
- French
Similar Records
Preparation of niobium nitride and niobium carbonitride thin films by reactive sputtering
Effects of methane in the deposition of superconducting niobium nitride thin films at ambient substrate temperature
Composition and structure of niobium nitride and carbonitride films obtained by reactive sputtering
Conference
·
Tue Dec 31 23:00:00 EST 1974
·
OSTI ID:4086680
Effects of methane in the deposition of superconducting niobium nitride thin films at ambient substrate temperature
Journal Article
·
Mon Jan 31 23:00:00 EST 1983
· J. Appl. Phys.; (United States)
·
OSTI ID:6631045
Composition and structure of niobium nitride and carbonitride films obtained by reactive sputtering
Journal Article
·
Tue Dec 31 23:00:00 EST 1974
· Vide, v. 30, no. 175, pp. 1-17
·
OSTI ID:4118368
Related Subjects
*NIOBIUM NITRIDES-- ELECTRICAL PROPERTIES
DENSITY
ELECTRIC CONDUCTIVITY
FILMS
N50120* --Metals
Ceramics
& Other Materials--Ceramics & Cermets--Preparation & Fabrication
N50130 --Metals
Ceramics
& Other Materials--Ceramics & Cermets--Properties
Structure & Phase Studies
SPUTTERING
SUPERCONDUCTIVITY
TEMPERATURE DEPENDENCE
TRANSITION TEMPERATURE
DENSITY
ELECTRIC CONDUCTIVITY
FILMS
N50120* --Metals
Ceramics
& Other Materials--Ceramics & Cermets--Preparation & Fabrication
N50130 --Metals
Ceramics
& Other Materials--Ceramics & Cermets--Properties
Structure & Phase Studies
SPUTTERING
SUPERCONDUCTIVITY
TEMPERATURE DEPENDENCE
TRANSITION TEMPERATURE