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LOW-ENERGY SPUTTERING YIELDS IN Hg

Journal Article · · Physical Review (U.S.) Superseded in part by Phys. Rev. A, Phys. Rev. B: Solid State, Phys. Rev. C, and Phys. Rev. D
Further data on sputtering yields for normally incident Hg/sup +/-ion bombardment in the energy range of 50 to 400 ev have been collected. Experimental data are used to determine the influence of atomic weight and heat of sublimation of the target material and to establish an empirical sputtering relation. Results provide strong support for a picture of sputterimg which might be termed playing three-dimensional billiards with atoms. The degree of filling of the inner shells, especially the d shells, determines how closely collisions approximate hard-sphere collisions. Energy is transferred most efficiently in metals with completely filled d shells. Accordingly, Cu, Ag, and Au have the highest sputtering yields. Results for Hg/sup +/- ion bombardment support theories developed by Langberg and by Silsbee but disagree with a theory published by Henschke. Conditions may be different, however, for the case of bomabardment with light ions such as hydrogen or helium. The sputtering yields of alloys do not seem to differ substantially from those of their main constituents. (auth)
Research Organization:
General Mills, Inc., Minneapolis
NSA Number:
NSA-13-008062
OSTI ID:
4272745
Journal Information:
Physical Review (U.S.) Superseded in part by Phys. Rev. A, Phys. Rev. B: Solid State, Phys. Rev. C, and Phys. Rev. D, Journal Name: Physical Review (U.S.) Superseded in part by Phys. Rev. A, Phys. Rev. B: Solid State, Phys. Rev. C, and Phys. Rev. D Vol. Vol: 112; ISSN PHRVA
Country of Publication:
Country unknown/Code not available
Language:
English

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