Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory
Journal Article
·
· Technical Physics
We developed a computer simulation program for investigation of solid self-sputtering under ion bombardment. The program is based on binary collision approximation, truncated Coulomb potential, and the model of local inelastic losses proportional to energy. As a result of simulation, the self-sputtering yield is calculated as a function of atomic number and ion energy. To verify the cascade simulation code, we created a self-sputtering theory for the case of hard sphere potential. Simulation results show good agreement with both experimental data and theory.
- OSTI ID:
- 22783679
- Journal Information:
- Technical Physics, Journal Name: Technical Physics Journal Issue: 10 Vol. 63; ISSN 1063-7842
- Country of Publication:
- United States
- Language:
- English
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