Sputtering of ErD$sub 2$: experiment and theory
Conference
·
OSTI ID:4189221
Experimental measurements were made of the sputtering yield of ErD$sub 2$ targets bombarded by D and A ions in the energy range 50-400 keV. A semiempirical sputtering theory is presented that relates sputtering to the energy deposited into atomic collisions beneath the target surface as well as at the surface. The theory accurately predicts the sputtering yields for both D and A bombardment. Additional calculated sputtering yields for ErD$sub 2$ targets are presented which should allow extrapolation to any ion in the range of Z = 1 to Z = 36 with an accuracy better than 50 percent. (auth)
- Research Organization:
- Sandia Labs., Albuquerque, N.Mex. (USA)
- NSA Number:
- NSA-33-005302
- OSTI ID:
- 4189221
- Report Number(s):
- SAND--75-5520; CONF-750965--2
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
*DEUTERIUM COMPOUNDS-- SPUTTERING
*ERBIUM COMPOUNDS-- SPUTTERING
*THERMONUCLEAR REACTOR MATERIALS-- SPUTTERING
700209* --Fusion Energy--Fusion Power Plant Technology-- Component Development & Materials Testing
ARGON IONS
DEUTERONS
N70800* --Physics--Controlled Thermonuclear Research-- Thermonuclear Engineering & Equipment
*ERBIUM COMPOUNDS-- SPUTTERING
*THERMONUCLEAR REACTOR MATERIALS-- SPUTTERING
700209* --Fusion Energy--Fusion Power Plant Technology-- Component Development & Materials Testing
ARGON IONS
DEUTERONS
N70800* --Physics--Controlled Thermonuclear Research-- Thermonuclear Engineering & Equipment