Transmission sputtering by heavy ions

Journal Article · Tue Aug 01 04:00:00 EDT 1978 · Phys. Rev., B; (United States)

DOI:https://doi.org/10.1103/PhysRevB.18.1020· OSTI ID:6694615

Ecker, K H; Merkle, K L

Transmission sputtering yields of single and polycrystalline gold foils have been measured as a function of thickness in the range 250--5000 A for bombardments with 560-keV Bi, 400-keV Ag, 200- and 400-keV Ar, and 50-keV He ions. Good agreement is found between the yield curves for polycrystalline and single-crystalline targets oriented in a high-index (random) direction. Calculated distributions of energy deposition in an amorphous target compare well with regard to the position of the maximum in the sputter yield. Absolute yields in the vicinity of the peak are generally in better agreement with yields calculated by Monte Carlo simulation for finite targets than with yields calculated on the basis of transport theory in an infinite solid. Compared with theory, all measured yield curves exhibit considerable enhancement at great depths. Sputter-yield distributions for a beam of 560-keV Bi ions along < 100 > are in qualitative agreement with channeling theory. From a comparison with the random sputter-yield distributions, it can be concluded that channeling of such heavy projectiles causes a relatively minor reduction (< or approx. = 40%) in the total amount of energy that goes into nuclear motion.

• Research Organization: Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
• OSTI ID: 6694615
• Journal Information: Phys. Rev., B; (United States), Journal Name: Phys. Rev., B; (United States) Vol. 18:3; ISSN PLRBA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular &amp; Chemical Physics-- Beams &amp; their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AMORPHOUS STATE
ARGON IONS
ATOMIC IONS
BISMUTH IONS
CHARGED PARTICLES
COLLISIONS
ELEMENTS
ENERGY RANGE
GOLD
HELIUM IONS
IONS
KEV RANGE
KEV RANGE 10-100
KEV RANGE 100-1000
METALS
SILVER IONS
SPUTTERING
TRANSITION ELEMENTS