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Title: Transmission sputtering by heavy ions

Abstract

Transmission sputtering yields of single and polycrystalline gold foils have been measured as a function of thickness in the range 250--5000 A for bombardments with 560-keV Bi, 400-keV Ag, 200- and 400-keV Ar, and 50-keV He ions. Good agreement is found between the yield curves for polycrystalline and single-crystalline targets oriented in a high-index (random) direction. Calculated distributions of energy deposition in an amorphous target compare well with regard to the position of the maximum in the sputter yield. Absolute yields in the vicinity of the peak are generally in better agreement with yields calculated by Monte Carlo simulation for finite targets than with yields calculated on the basis of transport theory in an infinite solid. Compared with theory, all measured yield curves exhibit considerable enhancement at great depths. Sputter-yield distributions for a beam of 560-keV Bi ions along < 100 > are in qualitative agreement with channeling theory. From a comparison with the random sputter-yield distributions, it can be concluded that channeling of such heavy projectiles causes a relatively minor reduction (< or approx. = 40%) in the total amount of energy that goes into nuclear motion.

Authors:
;
Publication Date:
Research Org.:
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
OSTI Identifier:
6694615
Resource Type:
Journal Article
Journal Name:
Phys. Rev., B; (United States)
Additional Journal Information:
Journal Volume: 18:3
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; GOLD; SPUTTERING; BISMUTH IONS; COLLISIONS; ARGON IONS; SILVER IONS; HELIUM IONS; AMORPHOUS STATE; KEV RANGE 100-1000; KEV RANGE 10-100; ATOMIC IONS; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; METALS; TRANSITION ELEMENTS; 640301* - Atomic, Molecular & Chemical Physics- Beams & their Reactions

Citation Formats

Ecker, K H, and Merkle, K L. Transmission sputtering by heavy ions. United States: N. p., 1978. Web. doi:10.1103/PhysRevB.18.1020.
Ecker, K H, & Merkle, K L. Transmission sputtering by heavy ions. United States. doi:10.1103/PhysRevB.18.1020.
Ecker, K H, and Merkle, K L. Tue . "Transmission sputtering by heavy ions". United States. doi:10.1103/PhysRevB.18.1020.
@article{osti_6694615,
title = {Transmission sputtering by heavy ions},
author = {Ecker, K H and Merkle, K L},
abstractNote = {Transmission sputtering yields of single and polycrystalline gold foils have been measured as a function of thickness in the range 250--5000 A for bombardments with 560-keV Bi, 400-keV Ag, 200- and 400-keV Ar, and 50-keV He ions. Good agreement is found between the yield curves for polycrystalline and single-crystalline targets oriented in a high-index (random) direction. Calculated distributions of energy deposition in an amorphous target compare well with regard to the position of the maximum in the sputter yield. Absolute yields in the vicinity of the peak are generally in better agreement with yields calculated by Monte Carlo simulation for finite targets than with yields calculated on the basis of transport theory in an infinite solid. Compared with theory, all measured yield curves exhibit considerable enhancement at great depths. Sputter-yield distributions for a beam of 560-keV Bi ions along < 100 > are in qualitative agreement with channeling theory. From a comparison with the random sputter-yield distributions, it can be concluded that channeling of such heavy projectiles causes a relatively minor reduction (< or approx. = 40%) in the total amount of energy that goes into nuclear motion.},
doi = {10.1103/PhysRevB.18.1020},
journal = {Phys. Rev., B; (United States)},
number = ,
volume = 18:3,
place = {United States},
year = {1978},
month = {8}
}