Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Investigation of sputtering and secondary-ion emission from polycrystalline metal foils under MeV heavy-ion bombardment

Thesis/Dissertation ·
OSTI ID:7201910
During this investigation, three analytical techniques were used: secondary-ion mass spectrometry, secondary-ion energy spectrometry, and total-sputtering-yield measurements. The mass-spectrometric measurements consisted, in part, of a comparison of positive secondary ion emission during 100-keV /sup 40/Ar/sup +/ and 70-MeV /sup 79/Br/sup 7 +/ ion bombardment of several targets. Results of these measurements demonstrated that the MeV projectiles were substantially more efficient in producing positive secondary ions of electronegative surface constituents. To supplement these observations, the variation of ion emission from Al, V, and Y surfaces was measured as a function of /sup 79/Br projectile energy. Measurements of integrated secondary-ion energy spectra were obtained from Cu, Nb, and Ta foils during 75 MeV /sup 79/Br/sup 8 +/ ion bombardment. The energy distributions were observed to peak at about 2 eV. Total sputtering yields were obtained from Nb and Y targets during 70-MeV /sup 79/Br/sup 7 +/, 100-keV /sup 40/Ar/sup +/, and 100-keV /sup 79/Br/sup +/ bombardment. The yields for the 70-MeV projectiles were 0.14 +/- 0.03 and 0.04 for Nb and Y, respectively. Consistency of results indicates that collisional sputtering is the dominant mechanism for the sputtering of metals during high-energy projectile bombardments.
Research Organization:
Yale Univ., New Haven, CT (USA)
OSTI ID:
7201910
Country of Publication:
United States
Language:
English