MERCURY ION BEAM SPUTTERING OF METALS AT ENERGIES 4-15 Kev
Journal Article
·
· Journal of Applied Physics (U.S.)
Sputtering yields for 14 metals from the 4th, 5th, and 6th periods are measured for normally incident Hg/sup +/ ions at energies between 4 and 15 kev. The sputtering rate is determined by measuring the time required for the ion beam to pierce a target foil. Results for the various metals show that yields at high energy behave similarly to yields previously found at lower ion energy, i.e., yields are closely linked to the position of the metal in the periodic chart. Yields increase in the 4th period from Ti through V, Fe, Co, Ni to Cu and in a similar fashion in the 5th period to Ag and in the 6th perfod to Au. It is suggested that Cu, Ag, and Au atoms with their more closely filled d shells behave more nearly like hard spheres, and thus produce the higher sputtering yields. (auth)
- Research Organization:
- General Mills, Inc., Minneapolis
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-15-018772
- OSTI ID:
- 4012784
- Journal Information:
- Journal of Applied Physics (U.S.), Journal Name: Journal of Applied Physics (U.S.) Vol. Vol: 32; ISSN JAPIA
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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