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METHOD AND APPARATUS FOR MEASURING THE THICKNESS OF A DEPOSIT

Patent ·
OSTI ID:4234701
A radiometric thickness gage is described which measures the intensity of a narrow band of x rays excited by BETA particles. The deposited layer whose thickness is to be measured is bombarded by a beta source and a portion of the x-ray spectrum thus excited is measured. (T.R.H.)
Research Organization:
Originating Research Org. not identified
NSA Number:
NSA-13-021138
OSTI ID:
4234701
Report Number(s):
GB 816062
Country of Publication:
United Kingdom
Language:
English

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Related Subjects

BETA PARTICLES
BETA SOURCES
DEPOSITS
EXCITATION
GAGES
INSTRUMENTS
LAYERS
MEASURED VALUES
PARTICLE SOURCES
RADIOACTIVITY
THICKNESS
X RADIATION