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Radiation hardened CMOS/SOS

Conference · · IEEE Trans. Nucl. Sci., v. NS-22, no. 6, pp. 2181-2184
OSTI ID:4094739

This paper reports the results of experiments designed to optimize the total dose ionizing radiation hardness of CMOS/SOS devices. Type 4007 inverter circuits were fabricated with variations in the process, including wet versus dry gate oxidation. Tolerable values (e.g. less than 1 $mu$A per mil of channel width) of post-radiation n-channel back leakage were obtained only with wet oxides. Threshold shifts of less than or equal to 1V for the n-channel devices and less than or equal to 2V for the p-channel devices were obtained after 10$sup 6$ rads (Si) on the best devices fabricated. (auth)

Research Organization:
Hughes Aircraft Co., Newport Beach, CA
NSA Number:
NSA-33-020345
OSTI ID:
4094739
Journal Information:
IEEE Trans. Nucl. Sci., v. NS-22, no. 6, pp. 2181-2184, Journal Name: IEEE Trans. Nucl. Sci., v. NS-22, no. 6, pp. 2181-2184; ISSN IETNA
Country of Publication:
United States
Language:
English

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