Radiation hardened CMOS/SOS
Conference
·
· IEEE Trans. Nucl. Sci., v. NS-22, no. 6, pp. 2181-2184
OSTI ID:4094739
This paper reports the results of experiments designed to optimize the total dose ionizing radiation hardness of CMOS/SOS devices. Type 4007 inverter circuits were fabricated with variations in the process, including wet versus dry gate oxidation. Tolerable values (e.g. less than 1 $mu$A per mil of channel width) of post-radiation n-channel back leakage were obtained only with wet oxides. Threshold shifts of less than or equal to 1V for the n-channel devices and less than or equal to 2V for the p-channel devices were obtained after 10$sup 6$ rads (Si) on the best devices fabricated. (auth)
- Research Organization:
- Hughes Aircraft Co., Newport Beach, CA
- NSA Number:
- NSA-33-020345
- OSTI ID:
- 4094739
- Journal Information:
- IEEE Trans. Nucl. Sci., v. NS-22, no. 6, pp. 2181-2184, Journal Name: IEEE Trans. Nucl. Sci., v. NS-22, no. 6, pp. 2181-2184; ISSN IETNA
- Country of Publication:
- United States
- Language:
- English
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