Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target

Book · Sun Dec 31 04:00:00 EST 1995

OSTI ID:379729

Fiedorowicz, H; Bartnik, A; Szczurek, M ^[1]

---

1. Military Univ. of Technology, Warsaw (Poland). Inst. of Optoelectronics; and others

Plasmas produced from laser-irradiated gas puff xenon targets, created by pulsed injection of xenon with high-pressure solenoid valve, offer the possibility of realizing a debrisless x-ray point source for the x-ray lithography applications. In this paper the authors present results of the experimental investigations on the x-ray generation from a gas puff xenon target irradiated with nanosecond high-power laser pulses produced using two different laser facilities: a Nd:glass laser operating at 1.06 {micro}m, which generated 10--15 J pulses in 1 ns FWHM, and Nd:glass slab laser, producing pulses of 10 ns duration with energy reaching 12 J for a 0.53 {micro}m wavelength or 20 J for 1.05 {micro}m. To study the x-ray emission different x-ray diagnostic methods have been used. X-ray spectra were registered using a flat CsAP crystal spectrograph with an x-ray film or a curved KAP crystal spectrograph with a convex curvature to an x-ray CCD readout detector. X-ray images have been taken using pinhole cameras with an x-ray film or a CCD array. X-ray yield was measured with the use of semiconductor detectors (silicon photodiodes or diamond photoconductors).

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 379729
• Report Number(s): CONF-9507222--; ISBN 0-8194-1882-X
• Country of Publication: United States
• Language: English

Related Subjects

07 ISOTOPE AND RADIATION SOURCES
DESIGN
EXPERIMENTAL DATA
LASER-PRODUCED PLASMA
NEODYMIUM LASERS
SOFT X RADIATION
VACUUM SYSTEMS
X-RAY SOURCES
X-RAY SPECTRA