Evaluation of the plasma distribution of a quasi-linear constricted plasma source

Journal Article · Mon Feb 01 04:00:00 EST 1999 · IEEE Transactions on Plasma Science

DOI:https://doi.org/10.1109/27.763051· OSTI ID:357677

Anders, A; MacGill, R A; Rubin, M ^[1]

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1. Lawrence Berkeley National Lab., CA (United States)

The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also be used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials.

• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 357677
• Journal Information: IEEE Transactions on Plasma Science, Journal Name: IEEE Transactions on Plasma Science Journal Issue: 1 Vol. 27; ISSN ITPSBD; ISSN 0093-3813
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
GLOW DISCHARGES
MATERIALS
ON-LINE MEASUREMENT SYSTEMS
PLASMA DIAGNOSTICS
PLASMA PRODUCTION
PROCESS CONTROL