Characterization of a low-energy constricted-plasma source

Journal Article · Sun Mar 01 04:00:00 EST 1998 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1148803· OSTI ID:597265

Anders, A ^[1]; Kuehn, M ^[2]

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1. Ernest Orlando Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)
2. Institute of Physics, Technical University of Chemnitz, 09107 Chemnitz (Germany)

The construction and principle of operation of the constricted-plasma source are described. A supersonic plasma stream is produced by a special form of a dc-glow discharge, the constricted glow discharge. The discharge current and gas flow pass through an orifice of small diameter (constriction) which causes a space charge double layer but also serves as a nozzle to gas-dynamically accelerate the plasma flow. Plasma parameters have been measured using Langmuir probes, optical emission spectroscopy, and a plasma monitor for mass-resolved energy measurements. Experiments have been done with nitrogen as the discharge gas. It was found that the energy distribution of both atomic and molecular ions have two peaks at about 5 and 15 eV, and the energy of almost all ions is less than 20 eV. The ionization efficiency decreases with increasing gas flow. The downstream plasma density is relatively low but activated species such as excited molecules and radicals contribute to film growth when the source is used for reactive film deposition. {copyright} {ital 1998 American Institute of Physics.}

• OSTI ID: 597265
• Report Number(s): CONF-980145--
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 3 Vol. 69; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
GAS FLOW
GLOW DISCHARGES
IONIZATION
NITROGEN
NOZZLES
PLASMA DENSITY
PLASMA DIAGNOSTICS
PLASMA PRODUCTION
SPACE CHARGE
SUPERSONIC FLOW