Tip{endash}sample distance feedback control in a scanning evanescent microwave microscope

Journal Article · Sat May 01 00:00:00 EDT 1999 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.123940· OSTI ID:337499

Duewer, F; Gao, C; Takeuchi, I; Xiang, X ^[1]

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1. Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)

We have developed a means of tip{endash}sample distance regulation for a scanning evanescent microwave microscope over conductive samples. Changes in resonant frequency and quality factor are measured, where changes in resonant frequency are related to the tip{endash}sample capacitance and changes in quality factor are related to microwave absorption. With the analytical expression of the tip{endash}sample capacitance as a function of tip{endash}sample distance, we can quantitatively regulate the tip{endash}sample separation. We demonstrated simultaneous noncontact imaging of topography and surface resistance with high spatial resolution. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 337499
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 18 Vol. 74; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
CAPACITANCE
FEEDBACK
MICROSCOPES
MICROWAVE EQUIPMENT
QUALITY FACTOR
RESONANCE
SURFACE PROPERTIES
TOPOGRAPHY