Tip{endash}sample distance feedback control in a scanning evanescent microwave microscope
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)
We have developed a means of tip{endash}sample distance regulation for a scanning evanescent microwave microscope over conductive samples. Changes in resonant frequency and quality factor are measured, where changes in resonant frequency are related to the tip{endash}sample capacitance and changes in quality factor are related to microwave absorption. With the analytical expression of the tip{endash}sample capacitance as a function of tip{endash}sample distance, we can quantitatively regulate the tip{endash}sample separation. We demonstrated simultaneous noncontact imaging of topography and surface resistance with high spatial resolution. {copyright} {ital 1999 American Institute of Physics.}
- OSTI ID:
- 337499
- Journal Information:
- Applied Physics Letters, Vol. 74, Issue 18; Other Information: PBD: May 1999
- Country of Publication:
- United States
- Language:
- English
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