Quantitative microwave evanescent microscopy

Journal Article · Mon Nov 01 00:00:00 EST 1999 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.125216· OSTI ID:687985

Gao, C; Duewer, F; Xiang, X ^[1]

---

1. Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)

We have developed a scanning evanescent microwave microscope with shielded tip geometry allowing quantitative characterization of the electrical impedance of insulating and conducting materials. By modeling the tip{endash}sample capacitance, quantitative estimates of the sample (both dielectric and conducting) electrical impedance (real and imaginary) and tip{endash}sample separation can be made. Measurements of the tip{endash}sample capacitance versus tip{endash}sample separation have been made and agree with estimated values. Also, the slope of the tip{endash}sample capacitance with respect to the tip{endash}sample distance is calculated to implement tip{endash}sample distance regulation for dielectric materials. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 687985
• Journal Information: Applied Physics Letters, Vol. 75, Issue 19; Other Information: PBD: Nov 1999
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
MICROSCOPES
DESIGN
MICROWAVE RADIATION
ELECTRIC IMPEDANCE
DIELECTRIC MATERIALS
SEMICONDUCTOR MATERIALS
CAPACITANCE