Quantitative microwave evanescent microscopy

Journal Article · Mon Nov 01 04:00:00 EST 1999 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.125216· OSTI ID:687985

Gao, C; Duewer, F; Xiang, X ^[1]

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1. Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)

We have developed a scanning evanescent microwave microscope with shielded tip geometry allowing quantitative characterization of the electrical impedance of insulating and conducting materials. By modeling the tip{endash}sample capacitance, quantitative estimates of the sample (both dielectric and conducting) electrical impedance (real and imaginary) and tip{endash}sample separation can be made. Measurements of the tip{endash}sample capacitance versus tip{endash}sample separation have been made and agree with estimated values. Also, the slope of the tip{endash}sample capacitance with respect to the tip{endash}sample distance is calculated to implement tip{endash}sample distance regulation for dielectric materials. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 687985
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 19 Vol. 75; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
CAPACITANCE
DESIGN
DIELECTRIC MATERIALS
ELECTRIC IMPEDANCE
MICROSCOPES
MICROWAVE RADIATION
SEMICONDUCTOR MATERIALS