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Analytical scanning evanescent microwave microscope and control stage

Patent ·
OSTI ID:1082722
; ; ; ;
A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric, nonlinear dielectric and conductive materials. The invention also allows quantitative estimation of microwave impedance using signals obtained by the scanned evanescent microwave probe and quasistatic approximation modeling. The SEMM can be used to measure electrical properties of both dielectric and electrically conducting materials.
Research Organization:
YMP (Yucca Mountain Project, Las Vegas, Nevada (United States))
Sponsoring Organization:
USDOE
DOE Contract Number:
AC03-76SF00098
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Number(s):
8,358,141
Application Number:
12/465,022
OSTI ID:
1082722
Country of Publication:
United States
Language:
English

References (12)

Near-Field Microwave Microscopy of Materials Properties book January 2001
Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis journal December 1996
Apertureless near‐field optical microscope journal September 1994
Controlling and tuning strong optical field gradients at a local probe microscope tip apex journal February 1997
Facts and artifacts in near-field optical microscopy journal March 1997
Use of time domain spectroscopy for measuring dielectric properties with a coaxial probe journal October 1986
A microwave scanning surface harmonic microscope using a re-entrant resonant cavity journal August 1995
Microwave Resonant Cavities for Sensing Moisture and Mass of Single Seeds and Kernels conference January 1992
Dielectric probe for permittivity and permeability measurements at low microwave frequencies conference January 1992
A Quasi-Static Analysis of Open-Ended Coaxial Lines (Short Paper) journal October 1987
Heterodyne electrostatic force microscopy used as a new non-contact test technique for integrated circuits conference January 1995
Sub-wavelength patterning of the optical near-field journal January 2004

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