Ion irradiation of preceramic polymer thin films

Journal Article · Mon Jul 01 04:00:00 EDT 1996 · Journal of the American Ceramic Society

DOI:https://doi.org/10.1111/j.1151-2916.1996.tb08021.x· OSTI ID:282222

Pivin, J C ^[1]; Colombo, P; Tonidandel, M ^[2]

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1. Centre de Spectrometrie Nucleaire et de Spectrometrie de Masse, Orsay (France)
2. Univ. di Padova (Italy)

Thin films of two preceramic polymers, namely polycarbosilane (PCS) and a silicone resin (SR350), were deposited on Si substrates. Instead of employing conventional annealing at high temperatures in an inert atmosphere, ion irradiation was used to achieve the polymer-to-ceramic conversion. A detailed investigation of the changes in the composition, chemical structure, and hardness was performed by means of ion bean analysis (Rutherford backscattering spectrometry, nuclear reaction analysis, and elastic recoil detection analysis), FTIR, Raman and nanoindentation, respectively. This processing method yielded amorphous Si-C and Si-O-C coatings possessing high hardness and density. Compared to films heat-treated under vacuum at 1,000 C, ion-irradiated ones exhibited a similar hydrogen content, a lower oxygen contamination, and a higher carbon content. Annealing at 1,000 C of previously irradiated films resulted in coatings still possessing a high carbon content and a high hardness.

• Sponsoring Organization: USDOE
• OSTI ID: 282222
• Journal Information: Journal of the American Ceramic Society, Journal Name: Journal of the American Ceramic Society Journal Issue: 7 Vol. 79; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AMORPHOUS STATE
ANNEALING
CHEMICAL COMPOSITION
DENSITY
FOURIER TRANSFORM SPECTROMETERS
HARDNESS
ION BEAMS
NUCLEAR REACTION ANALYSIS
OXYCARBIDES
RAMAN SPECTROSCOPY
RUTHERFORD SCATTERING
SILANES
SILICON
SILICON CARBIDES
SILICON COMPOUNDS
SILICONES
SYNTHESIS