Synthesis of novel inorganic films by ion beam irradiation of polymer films

Journal Article · Tue Nov 15 04:00:00 EST 1983 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.94186· OSTI ID:5470267

Venkatesan, T; Wolf, T; Allara, D; Wilkens, B J; Taylor, G N

We propose a novel technique to convert polymer films into useful inorganic films by ion beam irradiation. Along the track of an ion the polymer is dissociated into smaller fragments. Volatile fragments diffuse through the film and escape. Any element which is not removed in the form of volatile species is subsequently enriched with respect to the other elements. We demonstrate this effect in a polymer poly(dimethylsilylene-co-methylphenylsilylene), which initially has a C:Si ratio of 4.5:1. Upon irradiation with 2-MeV Ar/sup +/ ions at a dose of 10/sup 15/ ions/cm/sup 2/ the C:Si ratio changes to 3.4:1 as verified by Rutherford backscattering spectrometry. We believe that the effect of the ion beam irradiation is to produce more Si--C bonds at the expense of the C--H and Si--Si bonds, with < or approx. =10% of the original hydrogen being present in the film at high doses. The IR spectra of the film as a function of the irradiation dose show a progressive loss of fine molecular features with significant increase of the refractive index. The IR spectrum at the high doses appears to be due to a mixture of various Si and C bonds. However, the irradiated films are very hard and scratch resistant (knoop value > or approx. =1300), suggesting an increase in the number of silicon carbide bonds.

• Research Organization: Bell Laboratories, Murray Hill, New Jersey 07974
• OSTI ID: 5470267
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 43:10; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular &amp; Chemical Physics-- Beams &amp; their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON IONS
BACKSCATTERING
BEAMS
CARBIDES
CARBON COMPOUNDS
CHARGED PARTICLES
CHEMICAL COMPOSITION
COLLISIONS
ENERGY RANGE
FILMS
INFRARED SPECTRA
ION BEAMS
ION COLLISIONS
IONS
MEV RANGE
MEV RANGE 01-10
POLYMERS
SCATTERING
SILICON CARBIDES
SILICON COMPOUNDS
SPECTRA
SYNTHESIS