RF magnetron sputter-deposition of La{sub 0.5}CoO{sub 3}//Pt composite electrodes for Pb(Zr,Ti)O{sub 3} thin film capacitors

Conference · Mon Jul 01 04:00:00 EDT 1996

OSTI ID:253368

Raymond, M V; Al-Shareef, H N; Tuttle, B A; DiMos, D ^[1]; Evans, J T ^[2]

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1. Sandia National Labs., Albuquerque, NM (United States)
2. Radiant Technologies, Albuquerque, NM (United States)

La{sub 0.5}Sr{sub 0.5}CoO{sub 3} (LSCO) thin films have been deposited using RF magnetron sputter-deposition for use as an electrode material for PZT (PbZrTiO{sub 3}) thin film capacitors. Effect of O{sub 2}:Ar sputter gas ratio during deposition, on LSCO film properties was studied. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O{sub 2}: Ar ratio was increased for both as-deposited and annealed films. It was also found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers are discussed.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: Defense Advanced Research Projects Agency, Arlington, VA (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 253368
• Report Number(s): SAND--96-1478C; CONF-960401--58; ON: DE96011699
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
CAPACITORS
COBALT OXIDES
DEPOSITION
ELECTRODES
LANTHANUM OXIDES
PZT
SPUTTERING
STRONTIUM OXIDES
THIN FILMS