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Independent Electron and Ion Energy Distribution Control for Semiconductor Processing Phase I Final Technical Report

Technical Report ·
OSTI ID:2530169
 [1];  [2]
  1. Eagle Harbor Technologies, Inc.; Eagle Harbor Technologies, Inc.; Eagle Harbor Technologies, Inc.; Eagle Harbor Technologies, Inc.
  2. Eagle Harbor Technologies, Inc.
+ Show Author Affiliations
Research Organization:
Eagle Harbor Technologies, Inc.
Sponsoring Organization:
USDOE Office of Science (SC), Fusion Energy Sciences (FES)
DOE Contract Number:
SC0024861
OSTI ID:
2530169
Report Number(s):
EHT-2024-09
Country of Publication:
United States
Language:
English

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Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Electron control
tailored waveforms
bias
RF plasma
capacitively coupled plasma
CCP