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Electron bombarded semiconductor device. Phase 1, Final technical report

Technical Report ·
OSTI ID:10197657
Research Organization:
Advanced Technology Materials, Inc., Danbury, CT (United States)
DOE Contract Number:
FG05-91ER81259
OSTI ID:
10197657
Report Number(s):
DOE/ER/81259--1; ON: TI92021361
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360601
360602
42 ENGINEERING
426000
COMPONENTS
ELECTRON DEVICES AND CIRCUITS
PREPARATION AND MANUFACTURE
STRUCTURE AND PHASE STUDIES