Final Report for Phase I - Ion Implantation Processes in AlN for WBG Semiconductor Power Devices
Technical Report
·
OSTI ID:1177152
- Adroit Materials; Adroit Materials
- Adroit Materials
- Research Organization:
- Adroit Materials
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE), Advanced Manufacturing Office (EE-5A)
- DOE Contract Number:
- SC0011883
- OSTI ID:
- 1177152
- Report Number(s):
- DOE-AM-11883
- Country of Publication:
- United States
- Language:
- English
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