Characterization of niobium-doped titania epitaxial films deposited by metalorganic chemical vapor deposition

Journal Article · Thu Mar 15 04:00:00 EDT 2018 · Materials Characterization

DOI:https://doi.org/10.1016/J.MATCHAR.2018.01.044· OSTI ID:22804933

Zhao, Wei; Luan, Caina ^[1]; Ma, Xiaochen ^[2]; Feng, Xianjin; He, Linan; Ma, Jin ^[1]

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1. School of Microelectronics, Shandong University, Jinan 250100 (China)
2. BOE Technology Group Co. Ltd., Beijing 100016 (China)

Highlights: • The undoped and Nb-doped TiO{sub 2} films were deposited on SrTiO{sub 3} (100) substrates. • The epitaxial growth relationship between TiO{sub 2} film and the substrate was confirmed. • The microstructures of the films were explored. • The electrical and optical properties of the films were revealed. - Abstract: Titania (TiO{sub 2}) films with different niobium (Nb) doping concentrations were deposited on SrTiO{sub 3} (STO) (100) substrates by metalorganic chemical vapor deposition (MOCVD). The crystal structures, surface morphologies, electrical and optical properties of the Nb-doped TiO{sub 2} (TiO{sub 2}:Nb) films varying with Nb content were investigated. The single crystal TiO{sub 2} films with anatase structure were obtained at low Nb doping levels. The highest Hall mobility of the prepared films reached as high as 16.50 cm{sup 2} V{sup −1} s{sup −1}. The lowest resistivity of 5.75 × 10{sup −2} Ω cm with a Hall mobility of 7.40 cm{sup 2} V{sup −1} s{sup −1} and a carrier concentration of 1.47 × 10{sup 19} cm{sup −3} were obtained from the 1.20% Nb-doped TiO{sub 2} film. This resistivity was about 6 orders of magnitude lower than the undoped TiO{sub 2} film. Moreover, all the deposited films exhibited high average transmittances of over 88% in the visible wavelength range.

• OSTI ID: 22804933
• Journal Information: Materials Characterization, Journal Name: Materials Characterization Vol. 137; ISSN 1044-5803; ISSN MACHEX
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARRIER MOBILITY
CHEMICAL VAPOR DEPOSITION
CRYSTAL STRUCTURE
DOPED MATERIALS
EPITAXY
FILMS
HALL EFFECT
MICROSTRUCTURE
MONOCRYSTALS
OPTICAL PROPERTIES
STRONTIUM TITANATES
SUBSTRATES
SURFACES
TITANIUM OXIDES