Electrical and optical properties of Nb-doped TiO{sub 2} films deposited by dc magnetron sputtering using slightly reduced Nb-doped TiO{sub 2-x} ceramic targets

Journal Article · Thu Jul 15 04:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3358153· OSTI ID:22053742

Sato, Yasushi; Sanno, Yuta; Tasaki, Chihiro; Oka, Nobuto; Kamiyama, Toshihisa; Shigesato, Yuzo ^[1]

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1. Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558 (Japan)

Nb-doped anatase TiO{sub 2} films were deposited on unheated glass by dc magnetron sputtering using slightly reduced Nb-doped TiO{sub 2-x} targets (Nb concentration: 3.7 and 9.5 at. %) with various hydrogen or oxygen flow ratios. After postannealing in a vacuum (6x10{sup -4} Pa) at 500 deg. C for 1 h, both films were crystallized into the polycrystalline anatase TiO{sub 2} structure. The resistivity decreased from 1.6x10{sup -3} to 6.3x10{sup -4} {Omega} cm with increasing Nb concentration from 2.8 to 8.0 at. %, where the carrier density increased from 5.4x10{sup 20} to 2.0x10{sup 21} cm{sup -3} and the Hall mobility was almost constant at 5-7 cm{sup 2} V{sup -1} s{sup -1}. The films exhibited a high transparency of over 60%-80% in the visible region.

• OSTI ID: 22053742
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 4 Vol. 28; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CARRIER DENSITY
CERAMICS
DOPED MATERIALS
GLASS
HYDROGEN
MAGNETRONS
MOBILITY
NIOBIUM
OPACITY
OXYGEN
POLYCRYSTALS
SPUTTERING
THIN FILMS
TITANIUM OXIDES