Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition
We show that the uniformity of the lasing wavelength of vertical-cavity surface emitting lasers (VCSELs) can be as good as {plus_minus}0.3% across a entire 3 in. wafer in MOCVD growth with a similar run-to-run reproducibility.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 225047
- Report Number(s):
- SAND--96-0078C; CONF-960642--1; ON: DE96004703
- Country of Publication:
- United States
- Language:
- English
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