skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition

Abstract

We show that the uniformity of the lasing wavelength of vertical-cavity surface emitting lasers (VCSELs) can be as good as {plus_minus}0.3% across a entire 3 in. wafer in MOCVD growth with a similar run-to-run reproducibility.

Authors:
; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
225047
Report Number(s):
SAND-96-0078C; CONF-960642-1
ON: DE96004703
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: CLEO/QUELS `96: 16. annual conference on lasers and electro-optics and 6th quantum electronics and laser science conference: shedding new light on universal applications, Anaheim, CA (United States), 2-7 Jun 1996; Other Information: PBD: [1996]
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 36 MATERIALS SCIENCE; SEMICONDUCTOR LASERS; FABRICATION; ALUMINIUM ARSENIDES; CHEMICAL VAPOR DEPOSITION; GALLIUM ARSENIDES; CHEMICAL REACTORS; CAVITY RESONATORS

Citation Formats

Hou, H Q, Chui, H C, Choquette, K D, Hammons, B E, Breiland, W G, and Geib, K M. Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition. United States: N. p., 1996. Web. doi:10.2172/225049.
Hou, H Q, Chui, H C, Choquette, K D, Hammons, B E, Breiland, W G, & Geib, K M. Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition. United States. https://doi.org/10.2172/225049
Hou, H Q, Chui, H C, Choquette, K D, Hammons, B E, Breiland, W G, and Geib, K M. 1996. "Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition". United States. https://doi.org/10.2172/225049. https://www.osti.gov/servlets/purl/225047.
@article{osti_225047,
title = {Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition},
author = {Hou, H Q and Chui, H C and Choquette, K D and Hammons, B E and Breiland, W G and Geib, K M},
abstractNote = {We show that the uniformity of the lasing wavelength of vertical-cavity surface emitting lasers (VCSELs) can be as good as {plus_minus}0.3% across a entire 3 in. wafer in MOCVD growth with a similar run-to-run reproducibility.},
doi = {10.2172/225049},
url = {https://www.osti.gov/biblio/225047}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: