Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition
Abstract
We show that the uniformity of the lasing wavelength of vertical-cavity surface emitting lasers (VCSELs) can be as good as {plus_minus}0.3% across a entire 3 in. wafer in MOCVD growth with a similar run-to-run reproducibility.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 225047
- Report Number(s):
- SAND-96-0078C; CONF-960642-1
ON: DE96004703
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Conference
- Resource Relation:
- Conference: CLEO/QUELS `96: 16. annual conference on lasers and electro-optics and 6th quantum electronics and laser science conference: shedding new light on universal applications, Anaheim, CA (United States), 2-7 Jun 1996; Other Information: PBD: [1996]
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 36 MATERIALS SCIENCE; SEMICONDUCTOR LASERS; FABRICATION; ALUMINIUM ARSENIDES; CHEMICAL VAPOR DEPOSITION; GALLIUM ARSENIDES; CHEMICAL REACTORS; CAVITY RESONATORS
Citation Formats
Hou, H Q, Chui, H C, Choquette, K D, Hammons, B E, Breiland, W G, and Geib, K M. Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition. United States: N. p., 1996.
Web. doi:10.2172/225049.
Hou, H Q, Chui, H C, Choquette, K D, Hammons, B E, Breiland, W G, & Geib, K M. Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition. United States. https://doi.org/10.2172/225049
Hou, H Q, Chui, H C, Choquette, K D, Hammons, B E, Breiland, W G, and Geib, K M. 1996.
"Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition". United States. https://doi.org/10.2172/225049. https://www.osti.gov/servlets/purl/225047.
@article{osti_225047,
title = {Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition},
author = {Hou, H Q and Chui, H C and Choquette, K D and Hammons, B E and Breiland, W G and Geib, K M},
abstractNote = {We show that the uniformity of the lasing wavelength of vertical-cavity surface emitting lasers (VCSELs) can be as good as {plus_minus}0.3% across a entire 3 in. wafer in MOCVD growth with a similar run-to-run reproducibility.},
doi = {10.2172/225049},
url = {https://www.osti.gov/biblio/225047},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}
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