Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in-situ reflectometry

Journal Article · Tue Oct 01 04:00:00 EDT 1996 · IEEE Photonics Technology Letters

DOI:https://doi.org/10.1109/68.536629· OSTI ID:376051

Hou, H Q; Choquette, K D; Hammons, B E; Breiland, W G; Geib, K M ^[1]; Chui, H C ^[2]

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1. Sandia National Labs., Albuquerque, NM (United States)
2. Hewlett-Packard Co., San Jose, CA (United States)

Vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic vapor phase epitaxy. Excellent uniformity of Fabry-Perot cavity wavelength for VCSEL materials of {+-}0.2% across a 3-in diameter wafer was achieved. This results in excellent uniformity of the lasing wavelength and threshold current of VCSEL devices. Employing pregrowth calibrations on growth rates periodically with an in situ reflectometer, the authors obtained a run-to-run wavelength reproducibility for 770- and 850-nm VCSELs of {+-}0.3% over the course of more than a hundred runs.

• Research Organization: Sandia National Laboratory
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 376051
• Journal Information: IEEE Photonics Technology Letters, Journal Name: IEEE Photonics Technology Letters Journal Issue: 10 Vol. 8; ISSN 1041-1135; ISSN IPTLEL
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
ALUMINIUM ARSENIDES
CRYSTAL GROWTH
FABRICATION
GALLIUM ARSENIDES
LASER MATERIALS
LASER RADIATION
PERFORMANCE
SEMICONDUCTOR LASERS
VAPOR PHASE EPITAXY